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JTEC Panel Report on

Microelectromechanical Systems in Japan

Kensall D. Wise, Chair
Joseph M. Giachino
Henry Guckel
G. Benjamin Hocker
Stephen C. Jacobsen
Richard S. Muller

September 1994


TABLE OF CONTENTS

JTEC/WTEC Staff
Disclaimer
Abstract
Foreword
List of Figures
List of Tables

Executive Summary

1. Microelectromechanical Systems Development in Japan

Kensall D. Wise

2. Materials and Processes

Henry Guckel

3. MEMS-Based Sensors

G. Benjamin Hocker

4. Microactuators

Richard S. Muller

5. Sensor-Circuit Integration and System Partitioning

Kensall D. Wise

6. Packaging, Assembly, and Testing

Stephen C. Jacobsen

7. MEMS Design Techniques, Applications, and Infrastructure

Joseph M. Giachino

APPENDICES

A. Professional Experience of Panel Members

B. Professional Experience of Other Team Members

C. Site Reports

D. The Development of Microelectromechanical Systems:Activities in the United States of America

E. Glossary

Copyright

1994 by Loyola College in Maryland


Published: September 1994; WTEC Hyper-Librarian
www.nsf.gov www.darpa.mil www.doc.gov afosr.sciencewise.com