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JTEC Panel Report on

Microelectromechanical Systems in Japan

Kensall D. Wise, Chair
Joseph M. Giachino
Henry Guckel
G. Benjamin Hocker
Stephen C. Jacobsen
Richard S. Muller

September 1994

TABLE OF CONTENTS

JTEC/WTEC Staff
Disclaimer
Abstract
Foreword
List of Figures
List of Tables

Executive Summary

1. Microelectromechanical Systems Development in Japan

Kensall D. Wise

• Introduction
• MEMS in Japan
• Methodology for this Study
• Summary
• References

2. Materials and Processes

Henry Guckel

• Introduction
• Conventional Processing
• Lithographic Processing
• Atomically Precise Processing
• References

3. MEMS-Based Sensors

G. Benjamin Hocker

• Introduction
• Sensor Development in Japan
• Comparison With Sensor Development in the United States
• Summary and Conclusions
• References

4. Microactuators

Richard S. Muller

• Introduction
• Developments in Japan
• Summary and Conclusions
• References

5. Sensor-Circuit Integration and System Partitioning

Kensall D. Wise

• Introduction
• Sensor-Circuit Integration in the United States
• Sensor-Circuit Integration in Japan
• Issues in Sensor-Circuit Integration
• Conclusions
• References

6. Packaging, Assembly, and Testing

Stephen C. Jacobsen

• Introduction to PAT and Its Relationship to MEMS
• PAT Processes Occur at All Four Systems Levels
• Review of Packaging, Assembly, and Testing
• Sample Packages -- Levels and Processes
• Summary and Conclusions

7. MEMS Design Techniques, Applications, and Infrastructure

Joseph M. Giachino

• Introduction
• Design Techniques
• Applications
• Infrastructure
• References

APPENDICES

A. Professional Experience of Panel Members

B. Professional Experience of Other Team Members

C. Site Reports

• AIST, MITI
• Canon, Inc.
• Hitachi Center for Materials Processing Technology
• Kanagawa Academy of Science and Technology
• Matsushita Research Institute Tokyo Inc.
• Mechanical Engineering Laboratory, MITI
• Micromachine Center (MMC)
• Mitsubishi Electric Corporation
• Nagoya University
• Nippondenso Research Laboratories
• NTT Interdisciplinary Research Laboratories
• Olympus Optical Co., Ltd.
• Omron Corporation
• Seiko Instruments, Inc.
• SORTEC Corporation
• Tohoku Gakuin University
• Tohoku University
• Toyota Central Research and Development Laboratory
• University of Tokyo (Institute of Industrial Science)
• University of Tokyo (Department of Mechano-Informatics)
• University of Tokyo (Department of Mechanical Engineering for Production)
• Yaskawa Tsukuba Research Laboratory
• Yokogawa Electric Corporation
• Royal Melbourne Institute of Technology

D. The Development of Microelectromechanical Systems:Activities in the United States of America

E. Glossary

1994 by Loyola College in Maryland

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